R&D

Wonik IPS’s pioneering spirit and innovation are ongoing.
We will provide the highest quality systems and services.

Semiconductor Lab / Display Lab (ECO Lab)

Our R&D labs, which focus on discovering and developing next-gen processes and products, are actively performing joint research with device and parts manufacturers. We have a research clean room of 10 Class for mass-production systems, are directly designing new processes with the system and developing a next-gen flagship product pipeline. Furthermore, we are implementing various mechanical and electrical ideas that fundamentally innovate flagship systems.

Wonik IPS’s R&D labs have measuring instruments to test processes and monitor the results within the clean room of 10 Class. The measuring instruments are arranged and operated to measure thickness, resistance, particles and stress and analyze deposited films from various angles. We also actively use FE-SEM, which is useful in cross-section and component analysis with high resolution.

Systems in R&D labs are aiming for the concept of mirror tool, which has the same performance as those supplied to customers in terms of hardware and software. In line with a scaled-down trend in technology, we will have the latest SEM-Vision, which can analyze micro-particles under wafer conditions.

  1. 반도체 연구소 Semiconductor Lab
  2. 디스플레이 연구소 Display Lab (ECO Lab)

Wonik IPS’s R&D Competencies

  1. Maximize development effects
    with two R&D labs
    (Semiconductor Lab & Display Lab)
  2. R&D-oriented personnel structure
    (more than 50% of the total employees)
  3. 795 patent applications and 761 registered patents in Korea and across the world
    as of the end of March 2024

Research Achievements

  • patent applications
  • registered patents
  • Domestic
  • Overseas
  • CVD
  • ALD
  • OLED
  • Etcher
  • Solar
  • ETC

2018

  1. - Mass-produced QUANTA System
  2. - Exported display systems to China
  3. - Developed NOA System

2017

  1. - Developed QUANTA System

2016

  1. - Mass-produced GEMINI System

2015

  1. - Developed GEMINI System

2014

  1. - Mass-produced MAHA AL (ALD) System
  2. - Mass-produced MAHA MLT (MOLD) System

2013

  1. - Launched TSP mass-production line Inline Sputter
  2. - Exported FIC 8G Dry-Etcher overseas
  3. - Released MAHA MP System overseas for the first time

2012

  1. - Developed MAHA MP

2011

  1. - Released the 100th MAHA SP

2010

  1. - Mass-produced MAHA-MP System
  2. - Mass-produced a 300mm new metal system (AKRA)

2009

  1. - Developed MO-CVD hardware for LED manufacturing
  2. - Released the 100th PE-CVD System
  3. - Established Eco-Research Lab
  4. - Mass-produced Solar Cell PECVD System

2008

  1. - Mass-produced 300mm DB21 System
  2. - Mass-produced Solar Cell LPCVD System
  3. - Mass-produced MAHA-SP System

2007

  1. - Mass-produced a high-productivity semiconductor system (BLUETAIN)
  2. - Mass-produced LCD 8G Dry Etcher

2006

  1. - Launched LCD System
  2. - Assumed rights to 15 patents including RACVD and Bluetain

2005

  1. - Mass-produced metal ALD/CVD 300mm systems for the first time in Korea
  2. - Mass-produced Metal ALD/CVD 200mm systems for the first time in Korea

2004

  1. - Exported Solar Cell System to Japan

2002

  1. - Advanced into the PE-CVD market

1998

  1. - Mass-produced 200mm ALD systems for the first time in the world

1996

  1. - Signed a contract to jointly develop ALD 200mm and dry etch 200mm systems