R&D
Wonik IPS’s pioneering spirit and innovation are ongoing.
We will provide the highest quality systems and services.
Semiconductor Lab / Display Lab (ECO Lab)
Our R&D labs, which focus on discovering and developing next-gen processes and products, are actively performing joint research with device and parts manufacturers.
We have a research clean room of 10 Class for mass-production systems, are directly designing new processes with the system and developing a next-gen flagship product pipeline. Furthermore, we are implementing various mechanical and electrical ideas that fundamentally innovate flagship systems.
Wonik IPS’s R&D labs have measuring instruments to test processes and monitor the results within the clean room of 10 Class. The measuring instruments are arranged and operated to measure thickness, resistance, particles and stress and analyze deposited films from various angles. We also actively use FE-SEM, which is useful in cross-section and component analysis with high resolution.
Systems in R&D labs are aiming for the concept of mirror tool, which has the same performance as those supplied to customers in terms of hardware and software. In line with a scaled-down trend in technology, we will have the latest SEM-Vision, which can analyze micro-particles under wafer conditions.
- Semiconductor Lab
- Display Lab (ECO Lab)
Wonik IPS’s R&D Competencies
-
Maximize development effects
with two R&D labs
(Semiconductor Lab & Display Lab) -
R&D-oriented personnel structure
(more than 50% of the total employees) -
795 patent applications
and 761 registered patents
in Korea and across the world
as of the end of March 2024
Research Achievements
- patent applications
- registered patents
- Domestic
- Overseas
- CVD
- ALD
- OLED
- Etcher
- Solar
- ETC
2018
- - Mass-produced QUANTA System
- - Exported display systems to China
- - Developed NOA System
2017
- - Developed QUANTA System
2016
- - Mass-produced GEMINI System
2015
- - Developed GEMINI System
2014
- - Mass-produced MAHA AL (ALD) System
- - Mass-produced MAHA MLT (MOLD) System
2013
- - Launched TSP mass-production line Inline Sputter
- - Exported FIC 8G Dry-Etcher overseas
- - Released MAHA MP System overseas for the first time
2012
- - Developed MAHA MP
2011
- - Released the 100th MAHA SP
2010
- - Mass-produced MAHA-MP System
- - Mass-produced a 300mm new metal system (AKRA)
2009
- - Developed MO-CVD hardware for LED manufacturing
- - Released the 100th PE-CVD System
- - Established Eco-Research Lab
- - Mass-produced Solar Cell PECVD System
2008
- - Mass-produced 300mm DB21 System
- - Mass-produced Solar Cell LPCVD System
- - Mass-produced MAHA-SP System
2007
- - Mass-produced a high-productivity semiconductor system (BLUETAIN)
- - Mass-produced LCD 8G Dry Etcher
2006
- - Launched LCD System
- - Assumed rights to 15 patents including RACVD and Bluetain
2005
- - Mass-produced metal ALD/CVD 300mm systems for the first time in Korea
- - Mass-produced Metal ALD/CVD 200mm systems for the first time in Korea
2004
- - Exported Solar Cell System to Japan
2002
- - Advanced into the PE-CVD market
1998
- - Mass-produced 200mm ALD systems for the first time in the world
1996
- - Signed a contract to jointly develop ALD 200mm and dry etch 200mm systems