产品介绍
Cryster series 800 (Oxide)
Oxide TFT工艺设备是用于大型display制造工艺中Backplane基板热处理工艺的专业设备。
- #Oxide
Cryster series 600 (PI curing)
PI curing工艺设备是用于Flexible display制造工艺中Flexible基板Polyimide(PI) curing热处理工艺的专业设备。
- #PI curing
Cryster series 600
LTPS工艺设备是用于AMOLED Rigid/Flexible display制造工艺中Contact anneal、De-hydrogenation、Hydrogenation、Activation等高温热处理工艺的专业设备。
- #Contact anneal
- #De-hydrogenation
- #Hydrogenation
- #Activation
PECVD
PECVD is used to prevent moisture penetration of fiexible OLED devices. IPS PECVD has deposited SiNx thin films with optimized optical transmittance and stress for flexible OLEDs and has excellent self-cleaning performance, which can lower the production
- #SiNx depostion
- #SiON depostion
- #SiO2 depositon